AlN Substrates


high reliability



Advantages

• Excellent electrical performance

• Air tightness

• High sealing strength

• High reliability

 

Performance parameter

SN Performance Name Test conditions and units 96 alumina porcelain 97 alumina porcelain 99 alumina porcelain 99.6 Alumina porcelain
1 Content of main components   Al2O3≧95% Al2O3≧97% Al2O3≧99% Al2O3≧99.6%
2 Machinable size Min Max in mm 0.5-500 0.5-500 0.5-500 0.5-500
3 Highest precision of machinable dimension Micron 10 10 10 10
4 bulk density Room temperature, g/cm3 ≧3.67 ≧3.70 ≧3.85 ≧3.90
5 Flexural strength Room temperature, MPa ≧300 ≧300 ≧350 ≧400
6 compressive strength Room temperature, GPa ≧1.8 ≧1.8 ≧2.0 ≧2.3
7 Thermal conductivity W/m.K 10-20.0 10-20.0 15-21.0 15-21.0
8 Average linear expansion coefficient (20~500)℃,/℃ 7.36×10-6 6.9×10-6 6.9×10-6 6.9×10-6
9 Dielectric constant 20℃ 9.1 9.5 9.8 10
10 Tangent value of dielectric loss angle 20℃ ≦4×10-4 ≦3×10-4 ≦2×10-4 ≦2×10-4
11 Volume resistivity 100℃,  Ω.cm ≧1×1014 ≧1×1014 ≧1×1014 ≧1×1014
12 DC breakthrough strength KV/mm ≧30 ≧35 ≧25 ≧25
13 thermal shock resistance  Room temperature~800 Room temperature~800 Room temperature~600 Room temperature~350
14 Maximum operating temperature ≦1300 ≦1400 ≦1500 ≦1500
15 Acid resistance   sure good very good very good
16 Alkali resistance   commonly sure good very good
17 Degree of difficulty in metallization   easily Can do Difficult to do It's hard to do
18 Air tightness Pa•m3/s ≦1×10-11 ≦1×10-11 ≦1×10-10 ≦1×10-9

 

Application area

Electrical equipment


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AlN Substrates


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